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MIME 570 Micro- and Nano-Fabrication Fundamentals (3 unit茅s)

Offered by: G茅nie des mines et des mat茅riaux (G茅nie et l'architecture)

Vue d'ensemble

G茅nie des mines et des mat茅riaux : Fundamentals of micro- and nano-fabrication technologies. Lithographic, etching, deposition, and implantation and various control parameters of these processes and their resulting effects on structure, materials quality, and conformality.

Terms: Automne 2022

Instructors: Quitoriano, Nathaniel (Fall)

  • (3-0-6)

  • Prerequisite: MIME 467 or ECSE 330 or equivalent, or permission of instructor

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